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The study on adaptability and effect of mesh inducting for plasma immersion ion implantation on non-conductor polymer
location> Publications>The study on adaptability and effect of mesh inducting for plasma immersion ion implantation on non-conductor polymer
Y.X.Huang, J.S.Leng, X.B.Tian, Y.Li, The study on adaptability and effect of mesh inducting for plasma immersion ion implantation on non-conductor polymer, Acta Physica Sinica, 2012,61:15
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